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De-activation and clustering of B in Si at extremely high concentration

Type: 
Conference
Description: 
De-activation and clustering of B in Si at extremely high concentration/ROMANO L; AM PIRO; MG GRIMALDI; V. PRIVITERA; E. RIMINI.-(2006), pp. xxx-xxx.((Intervento presentato al convegno 16th International Conference on Ion Implantation Technology 2006 tenutosi a Marseille (Francia) nel 11/06/2006.
Publisher: 
IIT
Publication date: 
1 Jan 2006
Authors: 

L Romano, AM Piro, MG Grimaldi, V Privitera, E Rimini

Biblio References: 
Pages: xxx-xxx
Origin: 
16th International Conference on Ion Implantation Technology 2006
Link: 
https://www.iris.unict.it/handle/20.500.11769/101838

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