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E-MRS Spring Meeting 2015 Symposium Z: Nanomaterials and processes for advanced semiconductor CMOS devices

Type: 
Journal
Description: 
Publisher: 
Publication date: 
1 Jan 2016
Authors: 

Enrico Napolitani, Ray Duffy, Nikolas Zographos, Mark van Dal

Biblio References: 
Issue: 42 Pages: 165
Origin: 
Materials Science in Semiconductor Processing
Link: 
https://www.infona.pl/resource/bwmeta1.element.elsevier-21037e22-3118-3541-bc6b-...

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