Stefania Vitale, Gabriella Zappalà, Nunzio Tuccitto, Alberto Torrisi, Enrico Napolitani, Antonino Licciardello
Biblio references: Volume: 34 Issue: 3 Pages: 03H110
Origin: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena